Our completely integrated and flexible
vacuum and abatement solutions will ensure a safe operation in hazardous
processes, and reduce overall your operating costs.
We are dedicated to providing the optimum solutions for semiconductor processes, and our expertise in sub-fab solutions is unrivaled. Our global applications expertise ensures each system provides the optimum hardware and software, best vacuum and exhaust management practices, suitable ancillary
equipment, delivering the ideal installation with the most reliable operation.
All of our integrated systems have been designed based on global experience. We are leaders in vacuum and abatement, so we know what works. We constantly innovate and improve what we do because you demand excellence from Edwards.
integrated pump and abatement systems will bring significant benefits to EUV
lithography manufacturing. Our innovative leading technology
solutions and systemisation capabilities will bring improved process up-time,
yield, throughput and safety compliance whilst striving to balance the often
conflicting requirements of:
EZENITH offers an advanced portfolio of systems providing fully
integrated vacuum and exhaust management solutions for all of your
semiconductor processes applications. EZENITH systems are unique in offering:
With just a
pump and a gas abatement device, you still are not ready to run your process.
You will need to connect the pump exhaust, connect up your line heaters where
required, run your water, purge and electrical lines, and then get all of your
control signals ready. You will also have to consider double-enclosure, gas
leak detection, and how you want to conduct leak checks after your tool
maintenance. All of these things will cost you design time and money. We
understand the problem so we have developed integrated, process-specific
Our integrated systems are already pre-designed for
most semiconductor processes. The exhaust heaters are set for the correct
temperature to minimize cost and maximise up-time. We put leak check ports and
gate valves where they are required. The whole system is enclosed and, most
importantly, you only need to provide one of each of the required utilities. We
distribute the gases, water, electricity, and control signals where they are
needed and create a ready-to-go system.
Discover what makes us different...Corporate Responsibility ReportEdwards ISO/OHSAS CertificatesEdwards Leadership TeamVacuum Safety Booklet
When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.
Learn More about Our History
Learn more about our Integrated Solutions product offerings...
Integrated & Exhaust Management Solutions Brochure
Edwards has obsoleted all FabWorks and pre-FabWorks Equipment Monitoring products on January 15, 2017
Learn more about FabWorks Obsolescence